Jpn. J. Appl. Phys. 44 (2005) pp. 7072-7077  |Previous Article| |Next Article|  |Table of Contents|
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High-Speed Optical Microscanner Driven with Resonation of Lam Waves Using Pb(Zr,Ti)O₃ Thick Films Formed by Aerosol Deposition

Jun Akedo, Maxim Lebedev, Harumichi Sato and Jaehyuk Park

(Received May 16, 2005; accepted July 13, 2005; published September 22, 2005)

A high-performance optical microscanner with a resonance frequency over 20 kHz and a scan angle (peak-to-peak value) over 30° in atmospheric ambient, was successfully fabricated by deposit piezoelectric materials at a high rate by the AD method onto a metal scanner structure, which was fabricated by mechanical machining. The scanner is applicable to SVGA high-resolution display of 800×600 or more. This method is a powerful tool for realizing ceramic integration with metal components.

URL: http://jjap.jsap.jp/link?JJAP/44/7072/
DOI: 10.1143/JJAP.44.7072

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