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Jpn. J. Appl. Phys. 44 (2005) pp. 7267-7270  |Previous Article| |Next Article|  |Table of Contents|
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Selected Topics in Applied Physics

Physics of UV Materials and Devices and Their Applications

Characterization of Mg_xZn_1-xO Films Grown by Remote-Plasma-Enhanced Metalorganic Chemical Vapor-Deposition using bis-Ethylcyclopentadienyl Magnesium

Atsushi Nakamura¹, Kenji Yamamoto², Junji Ishihara², Toru Aoki^1,2 and Jiro Temmyo^1,2

¹Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan
²Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan

(Received February 9, 2005; accepted June 27, 2005; published October 11, 2005)

Mg_xZn_1-xO films were successfully grown on a-plane sapphire (1120) substrates by remote-plasma-enhanced metalorganic chemical vapor-deposition (RPE-MOCVD) using diethyl zinc (DEZn) and bis-ethylcyclopentadienyl magnesium (EtCp₂Mg). By increasing magnesium content in the films, the crystal structure was shifted through a mixed state from wurtzite to rock salt. The optical band-gap of the films at nearly 3.28 eV was shifted to 3.69 eV by alloying with magnesium depending on the alloy composition. Both optical absorption edges and emission peaks of Mg_xZn_1-xO films shifted to higher energy when the magnesium content at room temperature was increased, showing alloy broadening. The Stokes' shift of wurtzite Mg_xZn_1-xO alloy films was quantitatively evaluated. The results are relevant to exciton localization.

URL: http://jjap.jsap.jp/link?JJAP/44/7267/
DOI: 10.1143/JJAP.44.7267

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See Also:

• Japanese Journal of Applied Physics 49 (2010) 129201 (1 page) :

  Erratum : Retraction: “Characterization of Mg_xZn_1-xO Films Grown by Remote-Plasma-Enhanced Metalorganic Chemical Vapor-Deposition using bis-Ethylcyclopentadienyl Magnesium”

  Atsushi Nakamura, Kenji Yamamoto, Junji Ishihara, Toru Aoki, and Jiro Temmyo

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