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Jpn. J. Appl. Phys. 44 (2005) pp. L445-L448  |Previous Article|  |Table of Contents|
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Letter

Micromachined Optical Near-Field Bow-Tie Antenna Probe with Integrated Electrostatic Actuator

Takahito Ono, Kentaro Iwami and Masayoshi Esashi¹

Graduate School of Engineering, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
¹New Industry Creation Hatchery Center, Tohoku University, 6-6-01 Aza Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan

(Received November 22, 2004; accepted February 4, 2005; published March 18, 2005)

A bow-tie antenna structure consisting of two opposing metal electrodes separated by a narrow gap is fabricated with an integrated electrostatic actuator to allow the gap to be narrowed further. This configuration allows the near-field localization and conversion efficiency to be optimized beyond that achievable by direct fabrication. The structure is expected to represent an excellent near-field source for high-resolution imaging with high optical transmittance. Electrostatic actuation is demonstrated in both contact- and noncontact-mode operations, and near-field imaging is successfully performed using the device in the illumination mode.

URL: http://jjap.jsap.jp/link?JJAP/44/L445/
DOI: 10.1143/JJAP.44.L445

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