Jpn. J. Appl. Phys. 45 (2006) pp. 1447-1451  |Previous Article| |Next Article|  |Table of Contents|
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High-Speed Deposition of New Low-Refractive-Index Dielectric Film “SiOC” for Rewritable HD DVD Media

Tsukasa Nakai, Keiichiro Yusu¹, Yasuhiro Satoh and Sumio Ashida

(Received August 12, 2005; accepted November 25, 2005; published online February 24, 2006)

A low-refractive-index film plays an important role in attaining a high density of rewritable HD DVD optical recording media, for which the blue-violet laser of 405 nm wavelength incident on a 0.6-mm-thick substrate is used. We have developed a new low-refractive-index material, SiOC, for the medium, which can be sputter-deposited at much higher rates than the conventional SiO₂ film. The SiOC film is formed using a SiC target with an Ar and O₂ gas mixture using either a RF or DC power supply. The film exhibited similar optical constants as SiO₂, and DC sputtering in particular showed very low substrate temperature rise. The resultant deposition rate per sputter power is about three times higher than the rate of deposition using a SiO₂ target. The obtained thin film consists of Si, O, and C. Although the film includes a substantial amount of carbon, it showed almost the same optical characteristics as SiO₂. We demonstrated that the single-layer HD DVD rewritable medium with 20 GB capacity using SiOC film had satisfactory recording characteristics. We believe that this media can be manufactured at a cost similar to that of conventional rewritable DVDs in mass production.

URL: http://jjap.jsap.jp/link?JJAP/45/1447/
DOI: 10.1143/JJAP.45.1447
KEYWORDS:phase change optical recording, blue-violet laser, HD DVD, optical disc, rewritable, low-to-high signal polarity, low-refractive-index material, SiOC, fast deposition

References | Citing Article (1)

1. Y. Nagai, A. Ogawa and Y. Kashihara: Jpn. J. Appl. Phys. 42 (2003) 971[JSAP].
2. N. Ohmachi, S. Ashida, K. Yusu, T. Nakai, K. Ichihara and N. Nakamura: Jpn. J. Appl. Phys. 43 (2004) 4978[JSAP].
3. T. Nakai, T. Tsukamoto, S. Ashida, K. Yusu, N. Yoshida, K. Umezawa, N. Ohmachi, N. Morishita, N. Nakamura and K. Ichihara: Jpn. J. Appl. Phys. 43 (2004) 4987[JSAP].
4. T. Nakai, S. Ashida, K. Yusu, K. Umezawa, N. Ohmachi and N. Nakamura: Proc. 16th Symp. Phase Change Optical Information Storage, 2004, p. 73.
5. N. Ohmachi, N. Morishita, K. Yusu, N. Nakamura, T. Nakai and S. Ashida: Tech. Dig. Int. Symp. Optical Memory and Optical Data Storage, 2005, MP5.
6. S. Ohkubo, M. Kubogata and M. Okada: Tech. Dig. Optical Data Storage, 1998, p. 148.
7. E. Kariyada, S. Ohkubo, H. Tanabe and T. Ide: Proc. 15th Symp. Phase Change Optical Information Storage, 2003, p. 67.
8. E. Kariyada, S. Ohkubo, H. Tanabe and T. Ide: Jpn. J. Appl. Phys. 44 (2005) 3634[JSAP].
9. S. Ashida, T. Nakai, K. Yusu and K. Ichihara: Proc. 15th Symp. Phase Change Optical Information Storage, 2003, p. 62.
10. S. Ashida, K. Yusu, T. Nakai, T. Tsukamoto, K. Ichihara, N. Ohmachi, N. Morishita, A. Ogawa and N. Nakamura: 2003 MRS FALL Meet., HH4.2.
11. HD DVD Book Ver. 1.0, DVD Forum, 2004.
12. A. Ito: Shibaura Mechatronics Giho (2001) p. 2 [in Japanese].