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Jpn. J. Appl. Phys. 45 (2006) pp. 1530-1533  |Previous Article| |Next Article|  |Table of Contents|
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High-Density Ferroelectric Recording Using Diamond Probe by Scanning Nonlinear Dielectric Microscopy

Hirokazu Takahashi, Astushi Onoe, Takahito Ono1, Yasuo Cho2 and Masayoshi Esashi1

Corporate R&D Laboratories, Pioneer Corporation, 6-1-1 Fujimi, Tsurugashima, Saitama 350-2288, Japan
1Graduate School of Engineering, Tohoku University, 6-6-01 Aza-Aoba-Aramaki, Aoba-ku, Sendai 980-8579, Japan
2Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

(Received May 1, 2005; accepted October 29, 2005; published online March 8, 2006)

In this paper, we report the development of a diamond multiprobe for ultrahigh-density ferroelectric data storage based on scanning nonlinear dielectric microscopy (SNDM), which is a technique for determining polarized directions in ferroelectric domains by measuring a nonlinear dielectric constant with an electrical inductance–capacitance (LC) resonator. SNDM has the capability of both reading and writing nanosized polarized ferroelectric domain information at a high speed, since the SNDM technique is a purely electrical method. Boron-doped diamond synthesized by hot-filament chemical vapor deposition is chosen as a conductive and robust probe material. The diamond probes are fabricated using a combination of the silicon lost-mold technique and selective growth. We present the fabrication of the diamond multiprobe and data storage experiments using a ferroelectric LiTaO3 thin film. It is demonstrated that the boron-doped diamond probe can be used for data storage based on SNDM.

URL: http://jjap.jsap.jp/link?JJAP/45/1530/
DOI: 10.1143/JJAP.45.1530
KEYWORDS:diamond, scanning nonlinear dielectric microscopy, data storage, ferroelectric


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