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Jpn. J. Appl. Phys. 45 (2006) pp. L804-L806  |Previous Article| |Next Article|  |Table of Contents|
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Letter

Nanoimprinting Using Ni Molds Prepared from Highly Ordered Anodic Porous Alumina Templates

Takashi Yanagishita¹, Kazuyuki Nishio^1,2 and Hideki Masuda^1,2

¹Kanagawa Academy of Science and Technology, 5-4-30 Nishihashimoto, Sagamihara, Kanagawa 229-1131, Japan
²Department of Applied Chemistry, Tokyo Metropolitan University, 1-1 Minami-Osawa, Hachioji, Tokyo 192-0397, Japan

(Received May 22, 2006; accepted June 15, 2006; published online July 28, 2006)

Large-sized Ni molds having patterns of less than 100 nm period were fabricated from naturally ordered anodic porous alumina as a template. The obtained Ni molds could be applied to the nanoimprinting of photopolymerized polymers. An ordered hole array structure of polymer was generated by nanoimprinting using the Ni molds. The hole period of the polymer nanohole arrays could be controlled by changing the geometrical structure of the anodic porous alumina template.

URL: http://jjap.jsap.jp/link?JJAP/45/L804/
DOI: 10.1143/JJAP.45.L804

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References | Citing Articles (13)

1. S. Y. Chou, P. R. Krauss and P. J. Renstrom: Science 272 (1996) 85[Science].
2. B. D. Terris, H. J. Mamin, M. E. Best, J. A. Logan, D. Rugar and S. A. Rishton: Appl. Phys. Lett. 69 (1996) 4262[AIP Scitation].
3. J. Haisma, M. Verheijien, K. Heuvel and J. Berg: J. Vac. Sci. Technol. B 14 (1996) 4124[AIP Scitation].
4. M. Komuro, J. Taniguchi, S. Inoue, N. Kimura, Y. Tokano, H. Hiroshima and S. Matsui: Jpn. J. Appl. Phys. 39 (2000) 7075[JSAP].
5. Y. Hirai, S. Harada, H. Kikuta, Y. Tanaka, M. Okano, S. Isaka and M. Kobayashi: J. Vac. Sci. Technol. B 20 (2002) 2867[AIP Scitation].
6. H. Masuda and K. Fukuda: Science 268 (1995) 1466[Science].
7. H. Masuda, M. Yotsuya, M. Asano, K. Nishio, M. Nakao, A. Yokoo and T. Tamamura: Appl. Phys. Lett. 78 (2001) 826[AIP Scitation].
8. H. Masuda and M. Satoh: Jpn. J. Appl. Phys. 35 (1996) L126[JSAP].
9. H. Masuda, F. Hasegawa and S. Ono: J. Electrochem. Soc. 144 (1997) L127.

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