Jpn. J. Appl. Phys. 46 (2007) pp. 4138-4143  |Previous Article| |Next Article|  |Table of Contents|
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Very-Deep Nanometer-Size Domain Inversion in LiNbO₃: Proposal for Circular Form Full Cover Electrodes

Makoto Minakata, M. S. Islam¹, Shigehiro Nagano, Satoshi Yoneyama, Tatsuhiko Sugiyama, and Haruyuki Awano

(Received January 17, 2007; accepted April 9, 2007; published online July 4, 2007)

Very-deep nanometer-size domain inversions in lithium niobate (LiNbO₃) substrate have been realized using circular form full cover electrode (CF-FCE). From the calculated results, circular form electrode is better than that of rectangular type for fine domain inversion patterns. Domain inversion was performed by applying high voltage to CF-FCE. Using the proposed CF-FCE, we successfully fabricated 2 µm periodic domain inversion in a 500-µm-thick congruent LiNbO₃ (C-LN) crystal. It is also shown that smaller domain inversion width in the nanometer regime with high aspect ratio is possible using this technique. We obtained an aspect ratio as high as 870 for a domain inversion width of 575 nm. To our knowledge, such a high aspect ratio is reported for the first time.

URL: http://jjap.jsap.jp/link?JJAP/46/4138/
DOI: 10.1143/JJAP.46.4138

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