Jpn. J. Appl. Phys. 46 (2007) pp. 4193-4196  |Previous Article| |Next Article|  |Table of Contents|
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Electrical Characteristics and Preparation of Nanostructured Pb(Zr_0.5Ti_0.5)O₃ Films by Spray Pyrolysis

Horng-Show Koo^1,3, Mi Chen^2,, Yoichi Hotta³, and Tomoji Kawai³

(Received September 15, 2006; revised December 28, 2006; accepted March 14, 2007; published online July 4, 2007)

Nanostructured thin films of Pb(Zr_0.5Ti_0.5)O₃ on Pt (1000 Å)/Ti (100 Å)/SiO₂ (2000 Å)/Si substrates are prepared by spray pyrolysis and subsequently rapid thermal annealing. Lead nitrate, zirconium nitrate and titanium isopropoxide are used as starting material with ethylene glycol as solvent. The crystal structure of the as-sprayed films are transformed from the amorphous, pyrochlore and multiple phases of pyrochlore and perovskite to the single phase of perovskite as the annealing temperature is increased up to 500 °C. For the formation of single phase perovskite, excess lead of 10 mol % is required to compensate the loss of lead during the processing of the primitive films. The physical characteristics of the resultant films show the dielectric constant (ε_r) of 400, remanent polarization (2P_r) of 30.0 µC/cm² and coercive field (2E_c) of 70.0 kV/cm, respectively.

URL: http://jjap.jsap.jp/link?JJAP/46/4193/
DOI: 10.1143/JJAP.46.4193

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