Jpn. J. Appl. Phys. 46 (2007) pp. 6915-6919  |Next Article|  |Table of Contents|
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Application of BaTiO₃ Film Deposited by Aerosol Deposition to Decoupling Capacitor

Hironori Hatono, Tomokazu Ito, and Akihiko Matsumura

(Received May 14, 2007; accepted July 25, 2007; published online October 22, 2007)

By using aerosol deposition, BaTiO₃ films of more than 0.5 µm thickness were fabricated at room temperature on metal substrates. The dielectric constant of the films was 80 and their tan δ was 0.02 at 1 MHz. The change in the temperature characteristics of the capacitance of the films was rectilinear from room temperature to 180 °C. The films were fabricated on the substrates with Ra values of 0.011 and 0.048 µm. The breakdown voltages of the films were measured: the maximum value was 220 V/µm. The volume resistivities of thin films depended on film thickness. They stabilized at a value of 10¹² Ω·cm when the film thickness was 5 µm or more. These electric properties are considered to depend on film density. We manufactured a noise-cutting probe with a decoupling capacitor as an inspection apparatus for microwave devices in trial production using the BaTiO₃ films fabricated by aerosol deposition. The contact probe had a 0.3 mm diameter, a 5 mm length, and a 6-µm-thick BaTiO₃ film on the outer surface. Its capacitance was 0.5 nF. Its withstand voltage was 700 V. These values are sufficient for this application.

URL: http://jjap.jsap.jp/link?JJAP/46/6915/
DOI: 10.1143/JJAP.46.6915

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