Jpn. J. Appl. Phys. 46 (2007) pp. 7512-7513 |Previous Article| |Next Article| |Table of Contents|
|Full Text PDF (97K)| |Buy This Article|
Brief Communication
Angle-Dependent Measurement of Near Edge X-ray Absorption Fine Structure of Annealing Effect on Local Structure of Focused-Ion-Beam Chemical Vapor Deposition Diamond-Like Carbon
Akihiko Saikubo1,2,
Kazuhiro Kanda1,2,
Yuri Kato1,2,
Jun-ya Igaki1,2,
Reo Kometani1,2, and
Shinji Matsui1,2
1Graduate School of Science, Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
2Core Research for Evolutional Science and Technology, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan
(Received July 10, 2007; revised August 4, 2007; accepted August 12, 2007; published online November 6, 2007)
The annealing effect on the local structure of diamond-like carbon (DLC) formed by Ga+ focused-ion-beam chemical vapor deposition (FIB-CVD) was investigated by the incidence angle-dependent measurement of the C K-edge near edge X-ray absorption fine structure (NEXAFS) from 0 to 60°. The peak intensity corresponding to the resonance transition of 1s →σ* originating from carbon–gallium bonding markedly increased with incidence angle in the spectra of a FIB-CVD DLC film annealed at 400 °C. This angle dependency was attributable to the movement of residual Ga atoms from the bottom to the neighboring surface of the FIB-CVD DLC film.
URL:
http://jjap.jsap.jp/link?JJAP/46/7512/
DOI: 10.1143/JJAP.46.7512
KEYWORDS:near edge X-ray absorption fine structure, incidence angle dependence, diamond-like carbon, focused-ion-beam chemical vapor deposition, annealing effect, residual gallium
- S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama:
J. Vac. Sci. Technol. B 18 (2000) 3181[AIP Scitation].
- J. Fujita, M. Ishida, T. Ichihashi, T. Sakamoto, Y. Ochiai, T. Kaito, and S. Matsui:
Jpn. J. Appl. Phys. 41 (2002) 4423[JSAP].
- C. Lenardi, P. Piseri, V. Briois, C. E. Bottani, A. Li Bassi, and P. Milani:
J. Appl. Phys. 85 (1999) 7159[AIP Scitation].
- K. Kanda, T. Kitagawa, Y. Shimizugawa, Y. Haruyama, S. Matsui, M. Terasawa, H. Tsubakino, I. Yamada, T. Gejo, and M. Kamada:
Jpn. J. Appl. Phys. 41 (2002) 4295[JSAP].
- K. Kanda, Y. Shimizugawa, Y. Haruyama, I. Yamada, S. Matsui, T. Kitagawa, H. Tsubakino, and T. Gejo: Nucl. Instrum. Methods Phys. Res., Sect. B 206 (2003) 880.
- K. Kanda, J. Igaki, Y. Kato, R. Kometani, A. Saikubo, and S. Matsui: Radiat. Phys. Chem. 75 (2006) 1850.
- A. Hiraya, E. Nakamura, M. Hasumoto, T. Kinoshita, and K. Sakai:
Rev. Sci. Instrum. 66 (1995) 2104[AIP Scitation].
- P. E. Batson:
Phys. Rev. B 48 (1993) 2608[APS].
- M. Niibe, Y. Kakutani, K. Koida, S. Matsunari, T. Aoki, S. Terashima, H. Takase, K. Murakami, and Y. Fukuda: to be published in J. Vac. Sci. Technol. B.
