Jpn. J. Appl. Phys. 46 (2007) pp. L679-L681  |Table of Contents|
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Ultra-Water Repellency of Films Prepared by Capacitively Coupled C₂H₂F₂/Ar Discharge Plasma

Yasunori Ohtsu, Nobuhisa Yamagami, and Hiroharu Fujita

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