Jpn. J. Appl. Phys. 47 (2008) pp. 3929-3930 |Previous Article| |Next Article| |Table of Contents|
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Basic Study on Proximity Sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator
Department of Electronic Engineering, Tohoku Gakuin University, Tagajo, Miyagi 985-8537, Japan
1Department of Electrical Communications, Tohoku University, Sendai 980-8579, Japan
(Received November 26, 2007; accepted January 10, 2008; published online May 23, 2008)
Proximity sensing through the air-film damping effect caused by a longitudinal-mode vibrator is studied. Lateral flow of viscous fluid sandwiched between a test object and a vibrating (sensing) plate is subjected to resistive force. Therefore, it acts as a damper for the motion of vibration. Because the sensing plate is vibrated in its normal direction by a longitudinal-mode piezoelectric vibrator, electric properties of the vibrator vary depending on the vibrator-to-object distance. It is shown that the Q-value of the vibrator decreases from 8,000 to 1,000 in the range where the plate-to-objective distance is less than 0.5 mm.
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