Jpn. J. Appl. Phys. 47 (2008) pp. 4007-4010
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Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators
Masanori Ueda, Motoaki Hara, Shinji Taniguchi, Tsuyoshi Yokoyama, Tokihiro Nishihara, Ken-ya Hashimoto, and Yoshio Satoh
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