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Oxygen Sensing Properties of SrTiO3 Thin Films

Toru Hara, Takashi Ishiguro, Naoki Wakiya1, and Kazuo Shinozaki2

Development Planning Division, Taiyo Yuden Co., Ltd., 8-1 Sakae-cho, Takasaki, Gunma 370-8522, Japan
1Department of Materials Science, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan
2Department of Metallurgy and Ceramics Science, Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo 152-8550, Japan

(Received April 17, 2008; accepted July 28, 2008; published online September 19, 2008)

The oxygen sensing properties of SrTiO3-based thin films have been investigated at room temperature. First, nondoped SrTiO3 was investigated. Although such a material is highly sensitive, its electrical resistance was too high and not feasible for practical use. Donor (Nb5+) could lower the resistance of SrTiO3; however, the sensitivity was lost. UV-light irradiation or t2-type acceptor (Cr3+) doping could lower the resistance and yet maintain the sensitivity. In contrast to t2-type acceptor doping, e-type acceptor (Fe3+) doping could lower the resistance; however, the sensitivity was lost. In this paper, we discuss the phenomena from the viewpoint of polaron-controlled carrier conduction.

DOI: 10.1143/JJAP.47.7486
KEYWORDS:gas sensor, oxygen sensor, resistive sensor, SrTiO3 thin film, polaron

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