Jpn. J. Appl. Phys. 48 (2009) 04C110 (4 pages)  |Previous Article| |Next Article|  |Table of Contents|
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Fabrication of Periodically-Inverted AlGaAs Waveguides for Quasi-Phase-Matched Wavelength Conversion at 1.55 µm

Junya Ota, Wataru Narita, Ikuma Ohta, Tomonori Matsushita, and Takashi Kondo

Department of Materials Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan

(Received October 1, 2008; revised October 31, 2008; accepted November 6, 2008; published online April 20, 2009)

We have improved fabrication processes of periodically inverted AlGaAs waveguides for highly efficient quasi-phase-matched wavelength conversion. In order to reduce propagation losses in waveguiding devices fabricated based on sublattice reversal epitaxy, we have introduced template planarization by chemical mechanical polishing and low-temperature regrowth technique. Corrugations at the core/clad interface and the propagation loss at 1.55 µm has been reduced to 40 nm and 9 dB/cm, respectively. First-order quasi-phase-matched second-harmonic generation was demonstrated at 1.55 µm fundamental wavelength with a 1.47-mm-long device. Obtained internal conversion efficiency is 2.2%/W which is one order of magnitude lower than the theoretical value for an ideal lossless waveguide. A significant increase in the conversion efficiency is expected with a redesign of the device and further optimization of the fabrication processes.

DOI: 10.1143/JJAP.48.04C110

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