Jpn. J. Appl. Phys. 48 (2009) 06FE08 (4 pages)  |Previous Article| |Next Article|  |Table of Contents|
|Full Text PDF (255K)| |Buy This Article|

Nanohole Arrays Fabricated on Gold Surfaces by Total Wet Nanopatterning through Block Copolymer Masks

Ryoko Watanabe, Kaori Ito, Tomokazu Iyoda^*, and Hiroshi Sakaguchi¹

(Received November 30, 2008; accepted February 12, 2009; published online June 22, 2009)

Well-ordered nanohole arrays on atomically flat gold (111) surfaces were fabricated by wet etching through block copolymer (BC) masks using ferri/ferrocyanide etchant. Amphiphilic BCs consisting of poly(ethylene oxide) (PEO) and liquid crystalline poly(methacrylate) with azobenzene mesogens [PMA(Az)], PEO_m-b-PMA(Az)_n, blended with poly(ethylene glycol) monomethylether (EO) form hexagonally arranged ion-transporting nanocylinders of EO-blended PEO microdomains in the BC masks. Atomic force microscopy (AFM) revealed a hexagonally arranged nanohole array on each terrace of the gold surface after the total wet nanopattering including a 5 min etching. The diameter (d) and distance between neighboring nanoholes (D) were controlled by the degree of polymerization of the BC. Two kinds of nanohole arrays with (d, D) = (12 nm, 25 nm) and (20 nm, 41 nm) were obtained in good agreement with the d and D of the EO-blended PEO microdomains of the masks. Scanning tunneling microscopy (STM) indicated that the depth of nanoholes was 3.5 Å, corresponding to the thickness of a single atomic layer of gold, and the flatness of the bottom of the holes was confirmed.

URL: http://jjap.jsap.jp/link?JJAP/48/06FE08/
DOI: 10.1143/JJAP.48.06FE08

References | Citing Articles (2)

1. S. Kishioka, J. Nishino, and H. Sakaguchi: Anal. Chem. 79 (2007) 6851.
2. F. Davis and S. P. J. Higson: Biosens. Bioelectron. 21 (2005) 1.
3. K. J. K. Koerkamp, S. Enoch, F. B. Segerink, N. F. v. Hulst, and L. Kuipers: Phys. Rev. Lett. 92 (2004) 183901[APS].
4. T. Rindzevicius, Y. Alaverdyan, B. Sepulveda, T. Pakizeh, M. Käll, R. Hillenbrand, J. Aizpurua, and F. J. García de Abajo: J. Phys. Chem. C 111 (2007) 1207.
5. E. Delamarche, B. Michel, H. A. Biebuyck, and C. Gerber: Adv. Mater. 8 (1996) 719[CrossRef].
6. V. P. Menon and C. R. Martin: Anal. Chem. 67 (1995) 1920.
7. D. W. M. Arrigan: Analyst 129 (2004) 1157.
8. Y. Jin and S. Dong: Chem. Commun. (2002) 1780.
9. T. Rindzevicius, Y. Alaverdyan, M. Käll, W. A. Murray, and W. L. Barnes: J. Phys. Chem. C 111 (2007) 11806.
10. L. Wang, D. Miller, Q. Fan, J. Luo, M. Schadt, Q. Rendeng, G. R. Wang, J. Wang, G. R. Kowach, and C.-J. Zhong: J. Phys. Chem. C 112 (2008) 2448.
11. M. Park, C. Harrison, P. M. Chaikin, R. A. Register, and D. H. Adamson: Science 276 (1997) 1401[Science].
12. C. T. Black, K. W. Guarini, G. Breyta, M. C. Colburn, R. Ruiz, R. L. Sandstrom, E. M. Sikorski, and Y. Zhang: J. Vac. Sci. Technol. B 24 (2006) 3188[AIP Scitation].
13. H.-C. Kim and W. D. Hinsberg: J. Vac. Sci. Technol. A 26 (2008) 1369[AIP Scitation].
14. C. Tang, E. M. Lennon, G. H. Fredrickson, E. J. Kramer, and C. J. Hawker: Science 322 (2008) 429.
15. K. Shin, K. A. Leach, J. T. Goldbach, D. H. Kim, J. Y. Jho, M. Tuominen, C. J. Hawker, and T. P. Russell: Nano Lett. 2 (2002) 933[CrossRef].
16. M. Haupt, S. Miller, R. Glass, M. Arnold, R. Sauer, K. Thonke, M. Möller, and J. P. Spatz: Adv. Mater. 15 (2003) 829[CrossRef].
17. T. Kubo, J. S. Parker, M. A. Hillmyer, and C. Leighton: Appl. Phys. Lett. 90 (2007) 233113[AIP Scitation].
18. S.-J. Jeong, G. Xia, B. H. Kim, D. O. Shin, S.-H. Kwon, S.-W. Kang, and S. O. Kim: Adv. Mater. 20 (2008) 1898[CrossRef].
19. Y. Tian, K. Watanabe, X. Kong, J. Abe, and T. Iyoda: Macromolecules 35 (2002) 3739.
20. M. Komura and T. Iyoda: Macromolecules 40 (2007) 4106.
21. R. Watanabe, K. Kamata, and T. Iyoda: J. Mater. Chem. 18 (2008) 5482.
22. Y. Xia, X.-M. Zhao, E. Kim, and G. M. Whitesides: Chem. Mater. 7 (1995) 2332.
23. http://gwyddion.net/
24. R. Watanabe, K. Kamata, and T. Iyoda: Jpn. J. Appl. Phys. 47 (2008) 5039[JSAP].