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Jpn. J. Appl. Phys. 49 (2010) 04DK18 (5 pages)  |Previous Article| |Next Article|  |Table of Contents|
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Adsorption Properties of Thin Films Prepared by RF Sputtering with a Poly(biphenyltetracarboxylic dianhydride–paraphenylene diamine) Polyimide Target

Satoru Iwamori1, Satoshi Yano1, Ryousuke Sugimoto1, Akihiro Uemura1,2, Hiroyuki Matsumoto1,3, and Kazutoshi Noda4

1Graduate School of Natural Science and Technology, Kanazawa University, Kakumamachi, Kanazawa 920-1167, Japan
2Industrial Research Institute of Ishikawa, 2-1 Kuratsuki, Kanazawa 920-8203, Japan
3Corporate Advanced Technology Center, Iwasaki Electric Co., Ltd., 1-20 Fujimicho, Gyoda, Saitama 361-0021, Japan
4National Institute of Advanced Industrial Science and Technology (AIST), 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan

(Received October 2, 2009; revised November 22, 2009; accepted December 11, 2009; published online April 20, 2010)

Thin films were deposited onto a quartz crystal with a poly(biphenyltetracarboxylic dianhydride–paraphenylene diamine) (BPDA–PDA) polyimide target by RF sputtering, and the adsorption properties of these thin films for water, ethanol, acetone, acetaldehyde, toluene, and methyl salicylate were evaluated by the quartz crystal microbalance (QCM) method to characterize the surface properties of these thin films. Chemical structures, especially surface free energies of these thin films would affect the gas adsorption properties. In addition, the number of adsorbed gas molecules increased with decreasing molecular weight on each sputtered thin film. Furthermore, these gas molecules would be adsorbed inside the sputtered thin films as well as on the top surface. The number of adsorbed gas molecules increased with decreasing molecular size on each sputtered thin film.

URL: http://jjap.jsap.jp/link?JJAP/49/04DK18/
DOI: 10.1143/JJAP.49.04DK18


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