Jpn. J. Appl. Phys. 49 (2010) 04DL06 (4 pages) |Previous Article| |Next Article| |Table of Contents|
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Integration of Microcoil Magnetic Manipulation with High-Sensitivity Complementary Metal–Oxide–Semiconductor Photosensor Detection in Bio-Analyses
Institute of Electronics Engineering, National Tsing-Hua University, Hsinchu, Taiwan 30013, R.O.C.
(Received September 24, 2009; revised December 1, 2009; accepted December 5, 2009; published online April 20, 2010)
In this paper, an integration design including a microcoil device and a photodetector with analog-pulse output is proposed for the real-time control and monitoring of magnetic samples or beads of micrometer size. The microcoil array consisting of top metal layers in complementary metal–oxide–semiconductor (CMOS) integrated circuits can successfully manipulate and anchor the magnetic beads by a maximum of 9 G of electromagnetic field when driven by 10 mA. In addition, real-time detection of the location and size of the manipulated samples are demonstrated with an integrated pulse-frequency-modulation (PFM) photosensor array. On the basis of the light intensity received on the sensor plane underneath the microcoils, a bioreaction-induced self-luminance process with a minimal illumination of 5.77×10-5 W/m2 can be successfully identified. This integrated array realized by the CMOS process offers both manipulation and monitoring functions simultaneously, which allows for easier and low-cost parallel bioassay analysis on a single chip.
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