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Novel Si Nanodisk Fabricated by Biotemplate and Defect-Free Neutral Beam Etching for Solar Cell Application
Chi-Hsien Huang1,6,
Makoto Igarashi1,6,
Susumu Horita2,
Masaki Takeguchi3,
Yukiharu Uraoka4,
Takashi Fuyuki4,
Ichiro Yamashita4,5,6, and
Seiji Samukawa1,6
1Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
2School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan
3High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
4Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan
5Advanced Technology Research Laboratories, Panasonic Corporation, 3-4 Hikaridai, Seika, Kyoto 619-0237, Japan
6Japan Science and Technology Agency, CREST, 5 Sanbancho, Chiyoda, Tokyo 102-0075, Japan
(Received October 4, 2009; accepted November 10, 2009; published online April 20, 2010)
We have already developed a uniform silicon-based two-dimensional quantum dot superlattice (2D QDSL) (i.e., 2D array of Si nanodisks) on the x–y plane with high-density nanodisks (NDs) and controllable size and spacing between NDs. To integrate more nanodisks in the third dimension (z-axis), a new stacked nanodisk (S-ND) has been developed by using thin film deposition, bio-template and advanced alternate etching. The S-ND structure comprises of two NDs connected vertically by coupling a tunnel junction (TJ). The scanning transmission electron microscopy image clearly revealed the stacked structure. The quantum confinement of S-ND was confirmed by observing the Coulomb staircase at room temperature. Tunneling current could be controlled by changing TJ thickness. By simply changing the ND thickness, band gap energy (Eg) could be controlled. These characteristics of the quantum effect and Eg play important roles in QDSL solar cells.
URL:
http://jjap.jsap.jp/link?JJAP/49/04DL16/
DOI: 10.1143/JJAP.49.04DL16
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