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Jpn. J. Appl. Phys. 49 (2010) 04DL18 (6 pages)  |Previous Article| |Next Article|  |Table of Contents|
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Contrast Enhancement of Wavelength-Selective Detection of Mid-Infrared Using Localized Atmospheric-Pressure Plasma Treatment

Katsuya Masuno, Kohji Tashiro1, Masaru Hori2, Shinya Kumagai, and Minoru Sasaki

Department of Advanced Science and Technology, Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
1Department of Future Industry-Oriented Basic Science and Materials, Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan
2Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

(Received October 6, 2009; accepted November 30, 2009; published online April 20, 2010)

A new processing method to enhance the signal contrast of a mid-infrared (MIR) detector integrated with a wavelength-selective function is studied. Using the hydrophilic characteristic of an IR absorber solution, an absorber material is selectively deposited onto a hydrophilically modified area over the hot junctions in the diaphragm of a thermopile detector. The hydrophilic modification of the chip-mounted detector is realized using localized atmospheric Ar + O2 plasma treatment through a stencil mask. Using a thermograph, we measured thermal distributions over a previously fabricated detector, whose absorber material is deposited using a manual manipulator without a position-selective mechanism, and the newly fabricated detector for comparison. The newly fabricated detector exhibited a larger temperature difference between hot and cold junctions than that of the previous detector. The detector has an increased signal contrast of 100% from the baseline at the absorption peak.

URL: http://jjap.jsap.jp/link?JJAP/49/04DL18/
DOI: 10.1143/JJAP.49.04DL18


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