Jpn. J. Appl. Phys. 5 (1966) pp. 745B-745B  |Next Article|  |Table of Contents|
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Characteristics of a Microwave Discharge Chamber

Yozo Ohashi

URL: http://jjap.jsap.jp/link?JJAP/5/745B/
DOI: 10.1143/JJAP.5.745B

Original Paper :

• Japanese Journal of Applied Physics 5 (1966) pp. 519-533 :

  Characteristics of a Microwave Discharge Chamber

  Yōzō Ōhashi