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Anisotropic Bond Orientation of Amorphous Carbon by Deposition

Seiki Saito¹, Atsushi M. Ito², Arimichi Takayama², and Hiroaki Nakamura^1,2

(Received April 30, 2011; accepted October 24, 2011; published online January 20, 2012)

In general, diamond-like carbon is classified on the basis of the sp², sp³, and hydrogen contents, otherwise known as the ternary phase diagram of amorphous carbon. In this study, however, it has been found that there is still some structural difference even though amorphous carbons may be located at the same point on the ternary phase diagram. Bond orientations of two types of amorphous carbon, arising in the deposition and annealing processes, are investigated, and it is shown that the bond orientations are totally different from each other even though the sp², sp³, and hydrogen contents are the same.

URL: http://jjap.jsap.jp/link?JJAP/51/01AC05/
DOI: 10.1143/JJAP.51.01AC05

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