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Jpn. J. Appl. Phys. 51 (2012) 04DE08 (6 pages)  |Previous Article| |Next Article|  |Table of Contents|
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Wireless Charge Based Capacitance Measurement Circuits with On-Chip Spiral Inductor for Radio Frequency Identification Biosensor

Boram Kim, Shigeyasu Uno1, and Kazuo Nakazato

Department of Electrical and Computer Science, Graduation School of Engineering, Nagoya University, Nagoya 464-8603, Japan
1Department of Photonic, College of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan

(Received September 24, 2011; accepted December 14, 2011; published online April 20, 2012)

A wireless measuring system of charge based capacitance measurement (CBCM) circuit has been designed and demonstrated for biomedical applications. The radio frequency identification (RFID) chip that includes on-chip spiral inductor tag antenna, and RFID circuit, and CBCM sensor chip are fabricated within standard complementary metal oxide semiconductor (CMOS) process. The capacitance change caused by DNA detection can be converted into the voltage output using capacitance-to-voltage conversion circuit. To confirm the transmission of the capacitance, the poly-capacitor of fixed capacitance and on-chip spiral inductor tag antenna were fabricated using 1.2 µm, 2-metal, 2-poly CMOS technology. As a result of measurement, three different capacitances (34, 141, 564 fF) were detected wirelessly.

URL: http://jjap.jsap.jp/link?JJAP/51/04DE08/
DOI: 10.1143/JJAP.51.04DE08


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