Jpn. J. Appl. Phys. 51 (2012) 05EA06 (5 pages)  |Previous Article| |Next Article|  |Table of Contents|
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Oxidation Characteristics of Thin Al–Mo Alloy Films with Various Compositions as Metal Capping Layer on Cu

Mayumi B. Takeyama and Atsushi Noya

(Received October 14, 2011; accepted November 28, 2011; published online May 21, 2012)

The oxidation characteristics of Al–Mo alloy films (50 nm) deposited on Cu as a metal capping layer have been examined by varying the alloy composition. Cu oxidation from the surface and Cu out-diffusion toward the surface are well suppressed when using Al–Mo alloy with a Mo-rich composition. By using an Al₁₅Mo₈₅ alloy film, in which fine crystalline grains of AlMo₃ are dispersed in an amorphous phase of the alloy, a well-separated layer configuration of oxide/Al–Mo alloy/Cu without excess Cu diffusion and/or preferential Al oxidation in the alloy layer is realized upon oxidation at 350 °C for 1 h in air. It is revealed that Al₁₅Mo₈₅ alloy films are a useful candidate material of a metal capping layer for Cu interconnects.

URL: http://jjap.jsap.jp/link?JJAP/51/05EA06/
DOI: 10.1143/JJAP.51.05EA06

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