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Jpn. J. Appl. Phys. 51 (2012) 080001 (8 pages)  |Next Article|  |Table of Contents|
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Comprehensive Review

Revolution of Sensors in Micro-Electromechanical Systems

Masayoshi Esashi

World Premier International Research Center–Advanced Institute for Materials Research (WPI–AIMR), Tohoku University, Sendai 980-8579, Japan

(Received January 11, 2012; accepted May 28, 2012; published online July 17, 2012)

Microsensors realized by micro-electromechanical systems (MEMS) technology play a key role as the input devices of systems. In this report, the following sensors are reviewed: piezoresistive and capacitive pressure sensors, surface acoustic wave (SAW) wireless pressure sensors, tactile sensor networks for robots, accelerometers, angular velocity sensors (gyroscopes), range image sensors using optical scanners, infrared imagers, chemical sensing systems as Fourier transform infrared (FTIR) spectroscopy and gas chromatography, flow sensors for fluids, and medical sensors such as ultrafine optical-fiber blood pressure sensors and implantable pressure sensors.

URL: http://jjap.jsap.jp/link?JJAP/51/080001/
DOI: 10.1143/JJAP.51.080001


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