Jpn. J. Appl. Phys. 19 (1980) Supplement 19-1 pp. 253-257  |Previous Article| |Next Article|  |Table of Contents|
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11th Conf. (1979 Int.) Solid State Devices, Tokyo, 1979

(Invited) The Buried Channel CCD: an Inherently Reliable Technology

G. F. Amelio and N. W. Chanoski

MOS LSI Products Group, Fairchild Camera and Instrument Corporation 101 Bernal Road, San Jose, California 95119, U.S.A.

This paper discusses the reliability analysis of N-BCCD technology which was performed at our laboratories. In order to obtain a complete reliability profile of N-BCCD devices, tests were conducted at the test die level, finished device level and system level. The analysis shows that N-BCCD devices are more immune to oxide related failures compared to RAMS due to the reduced magnitude and negative electric field. Operating life test results taken on our 64 K-bit CCD memory (F464) indicate excellent integrity to oxide related failure modes in the memory array. An introduction and future outlook discussion is given to provide the reader with a perspective on this technology.

URL: http://jjap.jsap.jp/link?JJAPS/19S1/253/


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