Jpn. J. Appl. Phys. 22 (1983) Supplement 22-1 pp. 461-464  |Previous Article| |Next Article|  |Table of Contents|
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14th Conf. (1982 Int.) Solid State Devices, Tokyo, 1982

Single-Tube Color Imager Using Hydrogenated Amorphous Silicon

Sachio Ishioka, Yoshinori Imamura, Yukio Takasaki, Chushiro Kusano, Tadaaki Hirai and Saburo Nobutoki¹

Reactively sputtered hydrogenated amorphous silicon film is used as the photoconductive target of a vidicon type image pickup tube. It is indicated that hydrogen partial pressure in the discharge gas has to be 40% or more in order to attain suitable image pickup tube characteristics. Photo-electric properties and lag-characteristics are enormously improved by lightly doping boron into amorphous silicon film, and a blocking type target structure is effective for suppressing dark current of the pickup tube. Using doped amorphous silicon film with a color-filter-integrated face plate, a single-tube color imager is fabricated.

URL: http://jjap.jsap.jp/link?JJAPS/22S1/461/