Jpn. J. Appl. Phys. 24 (1985) Supplement 24-1 pp. 93-96  |Previous Article| |Next Article|  |Table of Contents|
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5th Symp. Ultrasonic Electronics, Tokyo, 1984

Observation of Dislocation Lines in a Transistor by Electron-Acoustic Microscopy

Hiroshi Takenoshita, Masahiro Managaki1 and Kaoru Mizuno2

Department of Electronics, College of Engineering, University of Osaka Prefecture, Mozu-Umemachi, Sakai, Osaka 591
1Semiconductor Division, Hanno Factory, Shindengen Electric Mfg., Minamicho, Hanno, Saitama 357
2Department of Physics, Faculty of Science, Shimane University, Nishi-Kawazucho, Matsue, Shimane 690

(Received November 28, 1984)

Electron acoustic images, EAIs, by electron-acoustic microscopy were studied by in situ observation at the same area of a Si transistor-chip Tr-chip under several bias conditions applied between the collector and the emitter. The results confirmed that the EAI contrast varies depending not only on the difference in the materials and the flatness of the surface but also on the bias conditions. Dislocation lines were clearly observed at the base region of the Tr-chip and were induced by the thermal diffusion process of the base layer production. However, dislocation lines were not observed from the structually same emitter region.

URL: http://jjap.jsap.jp/link?JJAPS/24S1/93/


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